Piezoelectric Bimorph Actuator With Integrated Strain Sensing Electrodes

Title: Piezoelectric Bimorph Actuator With Integrated Strain Sensing Electrodes
Creator: Mansour, Sepehr Zarif; Seethaler, Rudolf J.; Teo, Yik R.; Yong, Yuen Kuan; Fleming, Andrew J.
Relation: IEEE Sensors Journal Vol. 18, Issue 14, p. 5812-5817
Publisher Link: http://dx.doi.org/10.1109/JSEN.2018.2842138
Publisher: Institute of Electrical and Electronics Engineers (IEEE)
Resource Type: journal article
Date: 2018
Description: This paper describes a new method for estimating the tip displacement of piezoelectric benders. Two resistive strain gauges are fabricated within the top and bottom electrodes using an acid etching process. These strain gauges are employed in a half bridge electrical configuration to measure the surface resistance change, and estimate the tip displacement. Experimental validation shows a 1.1% maximum difference between the strain sensor and a laser triangulation sensor. Using the presented method, a damping-integral control structure is designed to control the tip displacement of the integrated bender.
Subject: piezoelectric actuators; strain measurement; displacement control
Identifier: http://hdl.handle.net/1959.13/1460038
Identifier: uon:45845
Identifier: ISSN:1530-437X
Language: eng
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